Faculty Profiles
Carlton M. Osburn, Ph.D.
Professor Emeritus
College of Engineering,
Electrical & Computer Engineering Department,
e-mail:
phone: 919-515-5153
Nano Research Area
- Nano-Characterization
- Nano-Electronics
Research Summary
Major research interests are integrated fabrication technologies and device and process design of advanced silicon devices, including: Metal Silicide Technology, Ultra Shallow Junctions, Gate Dielectrics, New Device Technologies, Hot Carrier Injection and Trapping, MEMS, and Microsensors.
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