Nano Research Area
- Nano-Materials & Engineering
Dr. Aspnes heads the Real-Time Diagnostics and Control Group. He has published over 450 papers with emphasis on the theory and practice of linear and nonlinear optical spectroscopies for determining properties of surfaces, interfaces, thin films, and bulk materials. Contributions include effective-medium models, development and application of high-accuracy and high-resolution methods of acquiring and analyzing optical data of materials and interfaces that are homogeneous or inhomogeneous on a nanoscopic scale, and the use of similar data to understand and control deposition and etching in real time. He is generally given credit for developing spectroscopic ellipsometry, the linear-optic materials/thin-film diagnostic technique on which integrated-circuits technology now depends.
Current research activities include continuing development of optical metrology, the anistropic bond model of nonlinear optics as a simple means of interpreting nonlinear-optical data, heteroepitaxial growth of III-V materials on Si by organometallic chemical vapor deposition, optimal extraction of information from spectra by a combination of direct- and reciprocal-space methods, and collaborations directed to understanding and applying interface plasmons.