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Faculty Profiles

Carlton Osburn

Nano Research Area

  • Nano-Characterization
  • Nano-Electronics

Research Summary

Major research interests are integrated fabrication technologies and device and process design of advanced silicon devices, including: Metal Silicide Technology, Ultra Shallow Junctions, Gate Dielectrics, New Device Technologies, Hot Carrier Injection and Trapping, MEMS, and Microsensors.

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