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Faculty Profiles

Steven Shannon

Nano Research Area

  • Nano-Characterization
  • Nano-Materials & Engineering

Research Summary

I study the mechanisms in plasma discharges that can extend materials fabrication to the nano-scale. My current research interests include advanced diagnostics for process control, novel plasma sources for new methods of materials fabrication, and correlation of global plasma parameters to on-surface material processes such as etching, deposition, and surface modification.

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